The Preferred Metal Material For High-purity Gas Systems: Stainless Steel

The preferred metal material for high-purity gas systems: stainless steel

In order to ensure the performance of fluid products, material composition content and impurity control are one of the key factors, which directly affect the ductility, corrosion resistance and post-welding performance of fluid products after processing. 1. Chromium Cr - Chromium Cr content with high oxidation resistance and corrosion resistance can ensure the formation of chromium oxide layer thickness on the surface of stainless steel and improve corrosion resistance. 2. Nickel Ni - stabilizes the austenite structure and has high ductility. Nickel Ni content can stabilize the austenite structure and ensure the ductility of stainless steel in a wider temperature range and different fluid media. 3. Carbon C - intergranular corrosion. The low carbon C content of carbides can prevent intergranular corrosion and prevent the precipitation of carbides after welding. 4. Sulfur S - Welding performance, low sulfur S content in sulfide, and at the same time, the sulfur S content in the material is within a narrow variation range, so as to ensure a high-quality weld shape, with neither depression nor bulge, forming a real welding inner wall Complete penetration is an inevitable requirement for high-purity applications. Only consistent semiconductor-grade welding quality can meet the efficient and high-quality production and construction of semiconductor engineering construction.

 5. Manganese Mn - Pitting corrosion

The low brittleness of manganese Mn content can improve the resistance of stainless steel to pitting corrosion while ensuring the ductility of stainless steel. The SEMI F20 standard specifies the chemical composition and metallurgical industry processing specifications for 316L stainless steel rods, forgings, extrusions, plates and pipes for semiconductor manufacturing applications to meet general, high-purity and ultra-high-purity fluid distribution system applications in the semiconductor industry. In order to achieve lower impurity content, on the basis of traditional material melting AOD (argon oxygen decarburization), vacuum melting VIM (vacuum induction melting) and even vacuum refining VAR (vacuum arc remelting) are performed to gradually remove unfavorable impurity carbon , sulfur, and manganese to improve the corrosion resistance and welding performance of stainless steel materials to meet the application requirements of ultra-high-purity fluid systems in the semiconductor industry. For more severe process media, other specialty alloys are typically Alloy 22, a nickel-based alloy containing Chromium Cr, Molybdenum Mo, and Tungsten W. With a lower iron content than other metallic materials, Alloy 22 offers outstanding resistance to pitting, intergranular corrosion and stress corrosion cracking while maintaining excellent welding properties.

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